Thin film piezoelectric acoustic transducer for fully implantable cochlear implants

Title
Thin film piezoelectric acoustic transducer for fully implantable cochlear implants
Authors
Keywords
Cochlear implant, Acoustic sensor, MEMS vibration-based transducers, Thin film PZT, Multi-channel cantilever array, Parylene membrane, Stimulation
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 280, Issue -, Pages 38-46
Publisher
Elsevier BV
Online
2018-07-20
DOI
10.1016/j.sna.2018.07.020

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