4.5 Article

Specific Sensing Mechanism Investigation of Surface Acoustic Wave Humidity Sensors Coated With Uniform Graphene Oxide Membrane

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 3, Pages 348-356

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2020.2980948

Keywords

Sensors; Humidity; Surface acoustic waves; Surface acoustic wave devices; Resonant frequency; Frequency measurement; Sensitivity; Surface acoustic wave; humidity sensor; graphene oxide; sensing mechanism; shear modulus; sheet conductivity

Funding

  1. National Natural Science Foundation of China [51875521]
  2. Zhejiang Provincial Natural Science Foundation of China [LZ19E050002]
  3. Science Fund for Creative Research Groups of National Natural Science Foundation of China [51821093]

Ask authors/readers for more resources

Surface acoustic wave (SAW) humidity sensors promise broad prospects for Internet of Things (IoT) applications due to the advantages of low cost, portability, and high sensitivity. However, previous researches mainly focused on developing SAW devices with higher resonant frequencies, or using new sensing materials to improve the performance of SAW humidity sensors. Few researches studied the specific response mechanism of SAW humidity sensors, which restricted further development of the sensors. In this paper, the sensing mechanism of a graphene oxide (GO) film-based SAW humidity sensor is thoroughly studied by investigating the mechanical and electrical parameters of the uniform GO membrane at different relative humidity (from 10% RH to 90% RH). After taking these parameters into consideration for the mechanism analysis, we quantitatively indicate that the mass loading (similar to 800 ppm) and viscoelastic effects (similar to 60 ppm) are the primary and secondary influence factors of the sensor's humidity response respectively, while the acoustoelectric interaction has little effect on the sensitivity. [2020-0024]

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