Piezoelectric MEMS sensors: state-of-the-art and perspectives

Published 2009 View Full Article

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Title
Piezoelectric MEMS sensors: state-of-the-art and perspectives
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 20, Issue 9, Pages 092001
Publisher
IOP Publishing
Online
2009-07-25
DOI
10.1088/0957-0233/20/9/092001

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