Giant piezoelectricity in PMN-PT thin films: Beyond PZT

A microelectromechanically controlled cavity optomechanical sensing system

(2012) Houxun Miao et al.   NEW JOURNAL OF PHYSICS

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

(2011) P. Muralt et al.   MRS BULLETIN

Giant Piezoelectricity on Si for Hyperactive MEMS

(2011) S. H. Baek et al.   SCIENCE

Applying uniform reversible strain to epitaxial oxide films

(2010) M. D. Biegalski et al.   APPLIED PHYSICS LETTERS

Characterization of epitaxial Pb(Zr,Ti)O3thin films deposited by pulsed laser deposition on silicon cantilevers

(2010) M D Nguyen et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Epitaxial piezoelectric MEMS on silicon

(2010) D Isarakorn et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Modeling and characterization of MEMS-based piezoelectric harvesting devices

(2010) T M Kamel et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Ferroelastic switching for nanoscale non-volatile magnetoelectric devices

(2010) S. H. Baek et al.   NATURE MATERIALS

All-Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition-Metal Oxide Thin Films

(2009) Luca Pellegrino et al.   ADVANCED MATERIALS

CMOS Ultrasound Transceiver Chip for High-Resolution Ultrasonic Imaging Systems

(2009) Insoo Kim et al.   IEEE Transactions on Biomedical Circuits and Systems

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Analytical Modeling of the Suspended-Gate FET and Design Insights for Low-Power Logic

(2008) Kerem Akarvardar et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Design and fabrication of MEMS logic gates

(2008) Chun-Yin Tsai et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Recent Progress in Materials Issues for Piezoelectric MEMS

(2008) Paul Muralt   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

(2008) K A Cook-Chennault et al.   Smart Materials and Structures