Vibration characteristics of micromachined piezoelectric diaphragms with a standing beam subjected to airflow

Title
Vibration characteristics of micromachined piezoelectric diaphragms with a standing beam subjected to airflow
Authors
Keywords
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Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 164, Issue 1-2, Pages 22-27
Publisher
Elsevier BV
Online
2010-09-30
DOI
10.1016/j.sna.2010.09.017

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