Article
Physics, Applied
Sarina Kinoshita, Takahiko Yanagitani
Summary: This study proposes sub-GHz bulk acoustic wave (BAW) piezoelectric transformers based on a combination of high and low dielectric constant thin films, which can enhance the efficiency and voltage gain of rectifier antennas. Experimental results demonstrate the potential application of this BAW transformer in wireless power transfer.
APPLIED PHYSICS LETTERS
(2021)
Article
Materials Science, Multidisciplinary
Jialin Wang, Yue Zheng, Azadeh Ansari
Summary: This study investigates the ferroelectric and acoustic performance of AlScN-based devices in nitrogen (N)-polar and metal-polar states, demonstrating the fabrication of unreleased metal-ferroelectric-metal (MFM) capacitors and suspended MFM structures. It is found that polarization inversion is accompanied by the modulation of thin-film stress and resistance, with N-polar FBAR showing a fundamental thickness-mode resonance frequency of 3.17 GHz and high effective electromechanical coupling coefficient. The FBAR frequency response changes when the polarization is switched from N-polar to metal-polar, paving the way for high-k(t)(2)-reconfigurable acoustic filters for next-generation communication systems operating at the super-high-frequency (SHF) range.
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
(2021)
Review
Physics, Applied
Takahiko Yanagitani, Shinji Takayanagi
Summary: Ion beam-induced polarization inversion film growth is an attractive method for fabricating various types of piezoelectric films, including thickness extensional mode and thickness shear mode structures for acoustic wave resonators. This technology shows great potential for a wide range of applications.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2021)
Article
Engineering, Electrical & Electronic
Feng Gao, Aisha M. Al-Qahtani, Abdelkrim Khelif, Farid Boussaid, Sarah Benchabane, Yu Cheng, Omar El Agnaf, Amine Bermak
Summary: A novel Lamb wave resonator with fully suppressed acoustic radiation in water is proposed for high-resolution mass-sensitive detection of biomolecules. The elimination of acoustic radiation is achieved by slowing down the Lamb wave to a velocity lower than the sound speed in water, enabling high-quality factor resonance and reducing sensing frequency noise. High aspect ratio electrodes are used to slow down the Lamb wave, enhancing mass sensitivity and overall sensing resolution.
IEEE SENSORS JOURNAL
(2021)
Article
Physics, Applied
B. Jiang, N. P. Opondo, S. A. Bhave
Summary: Silicon carbide (SiC) is known for its exceptional mechanical properties and has been widely used in microelectromechanical systems. Recent advancements in mechanical tuning of color centers in 4H-SiC have enhanced its application in quantum spintronics. This work demonstrates a lateral overtone mechanical resonator fabricated from a semi-insulating bulk 4H-SiC wafer, showcasing its potential for manipulating quantum states.
APPLIED PHYSICS LETTERS
(2021)
Article
Physics, Applied
A. R. Will-Cole, Ahmed E. Hassanien, Sila Deniz Calisgan, Min-Gyo Jeong, Xianfeng Liang, Sungho Kang, Vageeswar Rajaram, Isabel Martos-Repath, Huaihao Chen, Antea Risso, Zhenyun Qian, Seyed Mahdi Seyed Abrishami, Nader Lobandi, Matteo Rinaldi, Songbin Gong, Nian X. Sun
Summary: This article introduces N/MEMS technology, with a particular focus on devices based on the magnetoelectric effect. Magnetoelectric N/MEMS couple electrical and mechanical energy using electromechanical resonance under the excitation of a magnetic field and/or electric field, enabling new applications. The tutorial covers the basic principles of piezoelectric materials, resonator design, applications of piezoelectric N/MEMS, as well as the physics, magnetic material properties, state-of-the-art devices, and applications of magnetoelectric N/MEMS.
JOURNAL OF APPLIED PHYSICS
(2022)
Article
Engineering, Electrical & Electronic
Zachary Schaffer, Pietro Simeoni, Gianluca Piazza
Summary: In this work, a new class of thickness extensional microelectromechanical resonator called overmoded bulk acoustic resonator (OBAR) is proposed for filtering applications in the 5G millimeter wave spectrum. The OBAR operates in a second overtone thickness mode, distributing acoustic energy evenly between layers. Compared to traditional resonators, the OBAR has thicker piezo and metal layers, enabling higher frequency devices.
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS
(2022)
Article
Engineering, Electrical & Electronic
Jingjie Cheng, Zhaoliang Peng, Wenming Zhang, Lei Shao
Summary: This paper presents a novel type of high-overtone bulk acoustic resonators based on semi-insulating silicon carbide, which eliminates the need for metal electrodes by utilizing a unique structure design and piezoelectric transduction through a quantum well induced two-dimensional electron gas and a heavily-doped GaN layer as electrodes. Experimental results demonstrate the stable performance of the resonators across a wide temperature range.
IEEE ELECTRON DEVICE LETTERS
(2023)
Article
Physics, Applied
Xiaofan Yun, Wenkui Lin, Rui Hu, Yizhang Liu, Xiaoyi Wang, Guohao Yu, Zhongming Zeng, Xinping Zhang, Baoshun Zhang
Summary: This article presents a bandwidth-enhanced magnetoelectric (BWE-ME) antenna made of a Mo/AlN/FeGa sandwich stack. By combining high-overtone bulk acoustic resonators (HBARs) and film bulk acoustic resonators (FBARs) in parallel, the antenna achieves a broader bandwidth. Simulation results show that the magnetic flux density bandwidth generated by the multi-resonant mode interaction is 18 MHz, which matches the measured results.
APPLIED PHYSICS LETTERS
(2022)
Article
Physics, Applied
Zhiwei Wen, Wenjuan Liu, Tiancheng Luo, Xin Tong, Ying Xie, Xiyu Gu, Yan Liu, Yao Cai, Shishang Guo, Jian Wang, Chengliang Sun
Summary: This letter introduces a new type of laterally excited bulk acoustic resonator (XBAR) called SV-BAR, which suppresses higher-order spurious modes effectively by changing the scattering vias in the electrodes. The SV-BAR achieves 50Ω impedance matching and exhibits impressive performance parameters, making it a promising solution for high-performance radio frequency filters in 5G communication.
APPLIED PHYSICS LETTERS
(2023)
Article
Chemistry, Multidisciplinary
Linhao Shi, Weipeng Xuan, Biao Zhang, Shurong Dong, Hao Jin, Jikui Luo
Summary: FBAR-based filters using 2D phononic crystals as acoustic energy reflection layers achieve high reflectivity and wide bandgaps, showing good performance within a broad frequency range. The impedance spectra of such filters are smooth, with minimal spurious modes, demonstrating the potential for wide bandwidth and high power capability.
Article
Engineering, Electrical & Electronic
Yanmei Xue, Changjian Zhou, Xiu Yin Zhang, Mansun Chan
Summary: This study introduces a flexible lateral-field-excited film bulk acoustic resonator using transferred single-crystalline LiTaO3 piezoelectric thin films, demonstrating high-quality resonators with high Q values and temperature stability for different wave modes, suitable for future flexible front-end modules and temperature sensors.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Optics
Taekwon Yoon, David Mason, Vijay Jain, Yiwen Chu, Prashanta Kharel, William H. Renninger, Liam Collins, Luigi Frunzio, Robert J. Schoelkopf, Peter T. Rakich
Summary: This study presents a hybrid microwave-optical platform capable of coupling to bulk acoustic waves through cavity-enhanced piezoelectric and photoelastic interactions. The system achieves resonant and well-mode-matched interactions, demonstrating strong optomechanical interactions and high cooperativity using optical cavity enhancement. Furthermore, the device functions as a bidirectional electro-opto-mechanical transducer and offers a tool for probing anomalous electromechanical couplings.
Article
Physics, Applied
William Campbell, Serge Galliou, Michael E. Tobar, Maxim Goryachev
Summary: We investigated the electromechanical properties of quartz bulk acoustic wave resonators at extremely low temperatures. By applying a DC bias voltage, we demonstrated broad frequency tuning of high-Q phonon modes in a quartz bulk acoustic wave cavity at cryogenic temperatures. The resonance peak showed a tuning range of more than 100 line-widths without any degradation in the loaded quality factor, which remained high. The observed coefficient of frequency tuning was asymptotic to 3.5 mHz/V per overtone number n, reaching a maximum value of 255.5 mHz/V for the n=73 overtone mode. No degradation in the quality factor was observed for any applied biasing field.
APPLIED PHYSICS LETTERS
(2023)
Article
Biochemical Research Methods
Zhihe Guo, Xuyang Zhao, Yi Zhou, Yuxiang Li, Zhiran Liu, Man Luo, Xiang Wu, You Wang, Meng Zhang, Xi Yang
Summary: Packaged microbubble resonators with thin wall are used for label-free and specific detection of cTnI based on WGM, showing great potential in detecting cardiac biomarkers of AMI.
JOURNAL OF BIOPHOTONICS
(2022)
