A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure

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Title
A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure
Authors
Keywords
Humidity sensor, Surface acoustic wave, Graphene oxide, AlN thin film, Highly doped Si
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 255, Issue -, Pages 2454-2461
Publisher
Elsevier BV
Online
2017-09-09
DOI
10.1016/j.snb.2017.09.038

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