Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

Recent development of gallium oxide thin film on GaN

(2013) Hooi Shy Oon et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

ZnO Surface Acoustic Wave Sensors Built on Zein-Coated Flexible Food Packages

(2013) Pavel Ivanoff Reyes et al.   Sensor Letters

A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics

(2013) Jie Yang   SENSORS

Structural inhomogeneity and piezoelectric enhancement in ZnO nanobelts

(2012) Kasra Momeni et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

(2012) Peihong Wang et al.   APPLIED SURFACE SCIENCE

Diamond-like carbon films as piezoresistors in highly sensitive force sensors

(2012) M. Petersen et al.   DIAMOND AND RELATED MATERIALS

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

(2012) Matthew D. Williams et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

(2012) Xiangqin Meng et al.   MATERIALS LETTERS

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

(2012) M. A. Fraga et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Piezoresistive properties of amorphous carbon based nanocomposite thin films deposited by plasma assisted methods

(2012) Sigitas Tamulevičius et al.   THIN SOLID FILMS

Effects of crystallization and dopant concentration on the emission behavior of TiO2:Eu nanophosphors

(2012) Mou Pal et al.   Nanoscale Research Letters

Characteristics of SAW UV sensors based on a ZnO/Si structure using third harmonic mode

(2011) Duy-Thach Phan et al.   CURRENT APPLIED PHYSICS

Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film

(2011) M. A. Fraga et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Fabrication and Characterization of a Polycrystalline 3C-SiC Piezoresistive Micro-pressure Sensor

(2010) Gwiy-Sang Chung   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Highly piezoelectric AlN thin films grown on amorphous, insulating substrates

(2010) Alvaro Artieda et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Effect of nitrogen doping on piezoresistive properties of a-Si x C y thin film strain gauges

(2010) M. A. Fraga et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Harsh Environment Silicon Carbide Sensors for Health and Performance Monitoring of Aerospace Systems: A Review

(2009) D.G. Senesky et al.   IEEE SENSORS JOURNAL

Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

(2009) Joseph C Doll et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Surface acoustic wave characteristics of AlN thin films grown on a polycrystalline 3C-SiC buffer layer

(2009) Si-Hong Hoang et al.   MICROELECTRONIC ENGINEERING

Miniaturized pH Sensors Based on Zinc Oxide Nanotubes/Nanorods

(2009) Alimujiang Fulati et al.   SENSORS

Nickel containing diamond like carbon thin films

(2009) Ralf Koppert et al.   SOLID STATE SCIENCES

Electrical and piezoresistive properties of ion beam deposited DLC films

(2008) Š. Meškinis et al.   APPLIED SURFACE SCIENCE

Recent Progress in Materials Issues for Piezoelectric MEMS

(2008) Paul Muralt   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

A DLC/W-DLC multilayered structure for strain sensing applications

(2007) Takanori Takeno et al.   DIAMOND AND RELATED MATERIALS