AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
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Title
AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 24, Issue 20, Pages 2722-2727
Publisher
Wiley
Online
2012-04-12
DOI
10.1002/adma.201104842
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