CMOS Compatible Midinfrared Wavelength-Selective Thermopile for High Temperature Applications

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Title
CMOS Compatible Midinfrared Wavelength-Selective Thermopile for High Temperature Applications
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 1, Pages 144-154
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-06-03
DOI
10.1109/jmems.2014.2322675

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