GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators

(2015) Chengliang Sun et al.   APPLIED PHYSICS LETTERS

Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications

(2015) Ji Liang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

(2014) Chih-Ming Lin et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Extending of band gaps in silicon based one-dimensional phononic crystal strips

(2013) Duan Feng et al.   APPLIED PHYSICS LETTERS

Thin film Lamb wave resonators in frequency control and sensing applications: a review

(2013) Ventsislav Yantchev et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer

(2012) Guoqiang Wu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Silicon two-dimensional phononic crystal resonators using alternate defects

(2011) Nan Wang et al.   APPLIED PHYSICS LETTERS

Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice

(2011) Nan Wang et al.   IEEE ELECTRON DEVICE LETTERS

Reducing Anchor Loss in MEMS Resonators Using Mesa Isolation

(2009) M. Pandey et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS