Review: Semiconductor Piezoresistance for Microsystems

Published 2009 View Full Article

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Title
Review: Semiconductor Piezoresistance for Microsystems
Authors
Keywords
-
Journal
PROCEEDINGS OF THE IEEE
Volume 97, Issue 3, Pages 513-552
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-04-04
DOI
10.1109/jproc.2009.2013612

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