Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice

Title
Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 6, Pages 821-823
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-10
DOI
10.1109/led.2011.2136311

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