- Home
- Publications
- Publication Search
- Publication Details
Title
Thin-film piezoelectric MEMS
Authors
Keywords
-
Journal
MRS BULLETIN
Volume 37, Issue 11, Pages 1007-1017
Publisher
Cambridge University Press (CUP)
Online
2012-11-12
DOI
10.1557/mrs.2012.273
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Enhancement of Ferroelectric Polarization Stability by Interface Engineering
- (2012) H. Lu et al. ADVANCED MATERIALS
- Powering pacemakers from heartbeat vibrations using linear and nonlinear energy harvesters
- (2012) M. Amin Karami et al. APPLIED PHYSICS LETTERS
- PZT-Based Piezoelectric MEMS Technology
- (2012) Gabriel L. Smith et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Ultra-wide bandwidth piezoelectric energy harvesting
- (2011) Arman Hajati et al. APPLIED PHYSICS LETTERS
- Designing piezoelectric films for micro electromechanical systems
- (2011) S. Trolier-McKinstry et al. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
- Origins of Electro-Mechanical Coupling in Polycrystalline Ferroelectrics During Subcoercive Electrical Loading
- (2011) Abhijit Pramanick et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
- (2011) P. Muralt et al. MRS BULLETIN
- Large field-induced strains in a lead-free piezoelectric material
- (2011) J. X. Zhang et al. Nature Nanotechnology
- Giant Piezoelectricity on Si for Hyperactive MEMS
- (2011) S. H. Baek et al. SCIENCE
- Crystalline Oxides on Silicon
- (2010) James W. Reiner et al. ADVANCED MATERIALS
- Piezoelectric response of single-crystal PbZr1−xTixO3 near morphotropic phase boundary predicted by phase-field simulation
- (2010) Y. Cao et al. APPLIED PHYSICS LETTERS
- A morphotropic phase boundary system based on polarization rotation and polarization extension
- (2010) Dragan Damjanovic APPLIED PHYSICS LETTERS
- Design and Performance of an Optimal Inertial Power Harvester for Human-Powered Devices
- (2010) Jaeseok Yun et al. IEEE TRANSACTIONS ON MOBILE COMPUTING
- Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators
- (2010) Chengjie Zuo et al. SENSORS AND ACTUATORS A-PHYSICAL
- Harvested power and sensitivity analysis of vibrating shoe-mounted piezoelectric cantilevers
- (2010) L Moro et al. Smart Materials and Structures
- Ferroelectric properties of epitaxial Pb(Zr,Ti)O3 thin films on silicon by control of crystal orientation
- (2009) Matthijn Dekkers et al. APPLIED PHYSICS LETTERS
- Recent Progress in Materials Issues for Piezoelectric MEMS
- (2008) Paul Muralt JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Phase-Field Method of Phase Transitions/Domain Structures in Ferroelectric Thin Films: A Review
- (2008) Long-Qing Chen JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems
- (2008) K A Cook-Chennault et al. Smart Materials and Structures
Publish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn MoreBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started