Numerical and experimental study on silicon microresonators based on phononic crystal slabs with reduced central-hole radii

Title
Numerical and experimental study on silicon microresonators based on phononic crystal slabs with reduced central-hole radii
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 6, Pages 065030
Publisher
IOP Publishing
Online
2013-05-16
DOI
10.1088/0960-1317/23/6/065030

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