Characterization of a silicon nanowire-based cantilever air-flow sensor

Published 2012 View Full Article

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Title
Characterization of a silicon nanowire-based cantilever air-flow sensor
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 9, Pages 095008
Publisher
IOP Publishing
Online
2012-07-26
DOI
10.1088/0960-1317/22/9/095008

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