Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation

Title
Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation
Authors
Keywords
PDMS, Deep Brain Stimulation, Brain Stimulation, Chemical Mechanical Polishing, PDMS Layer
Publisher
Springer Nature
Online
2016-04-29
DOI
10.1007/s00542-016-2912-5

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