Low-Voltage Driven MEMS VOA Using Torsional Attenuation Mechanism Based on Piezoelectric Beam Actuators

Published 2010 View Full Article

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Title
Low-Voltage Driven MEMS VOA Using Torsional Attenuation Mechanism Based on Piezoelectric Beam Actuators
Authors
Keywords
-
Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 22, Issue 18, Pages 1355-1357
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-07-22
DOI
10.1109/lpt.2010.2056679

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