Journal
NANOSCALE
Volume 6, Issue 11, Pages 5606-5611Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c3nr05255a
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Funding
- Science and Engineering Research Council (SERC), Agency for Science, Technology and Research (A*STAR), Singapore [102-101-0022, 102-165-0084]
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An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 degrees C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.
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