Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor

Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power

(2011) Huicong Liu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Design and Characterization of Microelectromechanical System Flow Sensors Using Silicon Nanowires

(2011) Liang Lou et al.   Nanoscience and Nanotechnology Letters

Silicon nanowire piezoresistance: Impact of surface crystallographic orientation

(2010) Tymon Barwicz et al.   APPLIED PHYSICS LETTERS

Electrically Controlled Giant Piezoresistance in Silicon Nanowires

(2010) Pavel Neuzil et al.   NANO LETTERS

Exploitation of aeroelastic effects for drift reduction, in an all-polymer air flow sensor

(2010) C. Song et al.   SENSORS AND ACTUATORS A-PHYSICAL

Design and characterization of MEMS-based flow-rate and flow-direction microsensor

(2009) Chia-Yen Lee et al.   Microfluidics and Nanofluidics

MEMS-based gas flow sensors

(2009) Yu-Hsiang Wang et al.   Microfluidics and Nanofluidics