Influence of pulsed laser deposited hafnium oxide thin film as gate dielectric on the fabrication of Al0.1Ga0.9N/GaN MOS-HEMT
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Title
Influence of pulsed laser deposited hafnium oxide thin film as gate dielectric on the fabrication of Al0.1Ga0.9N/GaN MOS-HEMT
Authors
Keywords
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Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 153, Issue -, Pages 107136
Publisher
Elsevier BV
Online
2022-10-07
DOI
10.1016/j.mssp.2022.107136
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