Investigation on the Effect of Annealing Temperature on the Side Ohmic Contact Characteristics for Double Channel GaN/AlGaN Epitaxial Layer
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Title
Investigation on the Effect of Annealing Temperature on the Side Ohmic Contact Characteristics for Double Channel GaN/AlGaN Epitaxial Layer
Authors
Keywords
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Journal
Micromachines
Volume 13, Issue 5, Pages 791
Publisher
MDPI AG
Online
2022-05-20
DOI
10.3390/mi13050791
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