A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
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Title
A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
Authors
Keywords
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Journal
Micromachines
Volume 10, Issue 8, Pages 552
Publisher
MDPI AG
Online
2019-08-21
DOI
10.3390/mi10080552
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- (2018) Sijia Liu et al. IEEE Circuits and Systems Magazine
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- Bio-Based Transparent Conductive Film Consisting of Polyethylene Furanoate and Silver Nanowires for Flexible Optoelectronic Devices
- (2018) Jeun-Yan Lam et al. MACROMOLECULAR RAPID COMMUNICATIONS
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- (2018) Chadrasekhar Loka et al. MATERIALS LETTERS
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- (2018) Shiping Wen et al. NEURAL NETWORKS
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- (2018) Jiamin Chen et al. OPTICS EXPRESS
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- (2018) B. Wang et al. OPTIK
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- (2018) Zewen Lin et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- The Ultra-Low Power Performance of a-SiNx Oy :H Resistive Switching Memory
- (2018) Hui Zhang et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
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- (2018) Anika Himmler et al. SURFACE & COATINGS TECHNOLOGY
- Thermo-optic coefficient and nonlinear refractive index of silicon oxynitride waveguides
- (2018) A. Trenti et al. AIP Advances
- Effect of deposition conditions on physical properties of sputtered silicon oxynitride thin films on float glass
- (2018) Lukáš Šimurka et al. International Journal of Applied Glass Science
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- (2018) Nordine Sahouane et al. Materials Research Express
- The nitrogen concentration effect on Ce doped SiOxNy emission: towards optimized Ce3+ for LED applications
- (2018) F. Ehré et al. Nanoscale
- High quality factor silicon oxynitride optical waveguide ring resonators
- (2018) Yue Jia et al. OPTICAL MATERIALS
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- (2018) Pengzhan Zhang et al. OPTICS EXPRESS
- Improving the oxygen barrier properties of PET polymer by radio frequency plasma-polymerized SiOxNy thin film
- (2018) Marjan Shahpanah et al. SURFACE & COATINGS TECHNOLOGY
- Effects of radio frequency power and gas ratio on barrier properties of SiOxNy films deposited by inductively coupled plasma chemical vapor deposition
- (2018) S.-H. Bang et al. THIN SOLID FILMS
- Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands
- (2018) Andresa Baptista et al. Coatings
- Photoluminescence performance limits of Si nanocrystals in silicon oxynitride matrices
- (2017) Jan Valenta et al. JOURNAL OF APPLIED PHYSICS
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- (2017) I. Vivaldo et al. JOURNAL OF LUMINESCENCE
- Role of Hydrogen and Nitrogen on the Surface Chemical Structure of Bioactive Amorphous Silicon Oxynitride Films
- (2017) Venu G. Varanasi et al. JOURNAL OF PHYSICAL CHEMISTRY B
- Broad range refractive index engineering of Si x N y and SiO x N y thin films and exploring their potential applications in crystalline silicon solar cells
- (2017) Anishkumar Soman et al. MATERIALS CHEMISTRY AND PHYSICS
- Preparation of SiNx multilayer films by mid-frequency magnetron sputtering for crystalline silicon solar cells
- (2017) J.D. Li et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Structural and emission properties of Tb3+-doped nitrogen-rich silicon oxynitride films
- (2017) C Labbé et al. NANOTECHNOLOGY
- Bi-layered metal-oxide thin films processed at low-temperature for the encapsulation of highly stable organic photo-diode
- (2017) Ryu-ichi Satoh et al. ORGANIC ELECTRONICS
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- (2017) Huong Thi Thanh Nguyen et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature
- (2017) Hyung-Ik Lee et al. Scientific Reports
- Transparent high-performance SiO x N y /SiO x barrier films for organic photovoltaic cells with high durability
- (2017) Ju Won Lim et al. Nano Energy
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- (2017) Piyush K. Parashar et al. Scientific Reports
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- (2016) Yurun Feng et al. CERAMICS INTERNATIONAL
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- (2016) Seung Jun Lee et al. CERAMICS INTERNATIONAL
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- (2016) J. M. Ramírez et al. JOURNAL OF APPLIED PHYSICS
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- (2016) A Farhaoui et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
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- (2016) Samir Meziani et al. MATERIALS SCIENCE-POLAND
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- (2016) Wojciech Kijaszek et al. MATERIALS SCIENCE-POLAND
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- (2015) Vianou Irénée Madogni et al. CHEMICAL PHYSICS LETTERS
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- (2015) Joan Manel Ramírez et al. NANOTECHNOLOGY
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- (2015) Zongbo Zhang et al. POLYMER INTERNATIONAL
- Gas permeation properties of silicon oxynitride thin films deposited on polyether sulfone by radio frequency magnetron reactive sputtering in various N2 contents in atmosphere
- (2015) C.-C. Liu et al. THIN SOLID FILMS
- Investigation on optical and physico-chemical properties of LPCVD SiOxNythin films
- (2014) Bessem Kaghouche et al. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
- Photoluminescence of erbium in SiOxNy alloys annealed at high temperature
- (2014) E. Steveler et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Influence of biofunctionalization process on properties of silicon oxynitride substrate layer
- (2014) M. Kalisz et al. SURFACE AND INTERFACE ANALYSIS
- Bright red, orange-yellow and white switching photoluminescence from silicon oxynitride films with fast decay dynamics
- (2014) Rui Huang et al. Optical Materials Express
- Photoluminescence from SiNxOy films deposited by reactive sputtering
- (2013) G Sombrio et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150°C
- (2013) Balaji Rangarajan et al. SURFACE & COATINGS TECHNOLOGY
- Characterization of the Young's modulus and residual stresses for a sputtered silicon oxynitride film using micro-structures
- (2013) Jian Dong et al. THIN SOLID FILMS
- High-Performance Silicon-Nitride-Based Multiple-Wavelength Source
- (2012) Jacob S. Levy et al. IEEE PHOTONICS TECHNOLOGY LETTERS
- Light emission of silicon oxynitride films prepared by reactive sputtering of silicon
- (2012) Shyankay Jou et al. JOURNAL OF LUMINESCENCE
- Magnetron sputtered a-SiOxNy thin films: A closed porous nanostructure with controlled optical and mechanical properties
- (2011) V. Godinho et al. MICROPOROUS AND MESOPOROUS MATERIALS
- Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
- (2011) Brett Hallam et al. SOLAR ENERGY MATERIALS AND SOLAR CELLS
- Stable deposition of silicon oxynitride thin films with intermediate refractive indices by reactive sputtering
- (2011) Yuki Nakanishi et al. THIN SOLID FILMS
- SiOxNy thin films with variable refraction index: Microstructural, chemical and mechanical properties
- (2010) V. Godinho et al. APPLIED SURFACE SCIENCE
- Characteristics of Silicon Oxynitride Barrier Films Grown on Poly(ethylene naphthalate) by Ion-Beam-Assisted Deposition
- (2010) Do Kyung Lee et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Mechanical and dielectric properties of porous Si2N2O–Si3N4 in situ composites
- (2008) Li ShuQin et al. CERAMICS INTERNATIONAL
- Effects of N2 addition on enhanced scratch resistance of flexible polycarbonate substrates by low temperature plasma-polymerized organo-silicon oxynitride
- (2008) Y.-S. Lin et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
- Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides
- (2008) Kazuhiro Ikeda et al. OPTICS EXPRESS
- A novel process for forming an ultra-thin oxynitride film with high nitrogen topping
- (2007) Chiung Hui Lai et al. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
- Silicon oxynitride gas barrier coatings on poly(ether sulfone) by plasma-enhanced chemical vapor deposition
- (2007) Juno Shim et al. SURFACE & COATINGS TECHNOLOGY
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