A novel process for forming an ultra-thin oxynitride film with high nitrogen topping

Published 2007 View Full Article

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Title
A novel process for forming an ultra-thin oxynitride film with high nitrogen topping
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Volume 69, Issue 2-3, Pages 456-460
Publisher
Elsevier BV
Online
2007-08-04
DOI
10.1016/j.jpcs.2007.07.107

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