Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers

Published 2011 View Full Article

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Title
Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
Authors
Keywords
-
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 96, Issue -, Pages 173-179
Publisher
Elsevier BV
Online
2011-10-18
DOI
10.1016/j.solmat.2011.09.052

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