Photoluminescence from SiNxOy films deposited by reactive sputtering

Title
Photoluminescence from SiNxOy films deposited by reactive sputtering
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 23, Pages 235106
Publisher
IOP Publishing
Online
2013-05-24
DOI
10.1088/0022-3727/46/23/235106

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