Characterization of the Young's modulus and residual stresses for a sputtered silicon oxynitride film using micro-structures

Published 2013 View Full Article

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Title
Characterization of the Young's modulus and residual stresses for a sputtered silicon oxynitride film using micro-structures
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 545, Issue -, Pages 414-418
Publisher
Elsevier BV
Online
2013-08-20
DOI
10.1016/j.tsf.2013.08.065

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