PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
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Title
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2023-10-30
DOI
10.1002/ppap.202300150
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