Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS
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Title
Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO
x
thin films on PDMS
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2022-01-22
DOI
10.1002/ppap.202100174
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