PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
出版年份 2023 全文链接
标题
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume -, Issue -, Pages -
出版商
Wiley
发表日期
2023-10-30
DOI
10.1002/ppap.202300150
参考文献
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