Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N2 discharges on experimental timescales

Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges

(2023) Tobias Gergs et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The 2022 Plasma Roadmap: low temperature plasma science and technology

(2022) I Adamovich et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Influence of ion irradiation-induced defects on phase formation and thermal stability of Ti0.27Al0.21N0.52 coatings

(2022) Damian M. Holzapfel et al.   ACTA MATERIALIA

Characterization of descriptors in machine learning for data-based sputtering yield prediction

(2021) Hiori Kino et al.   PHYSICS OF PLASMAS

Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films

(2021) Soheil Karimi Aghda et al.   ACTA MATERIALIA

LAMMPS - A flexible simulation tool for particle-based materials modeling at the atomic, meso, and continuum scales

(2021) Aidan P. Thompson et al.   COMPUTER PHYSICS COMMUNICATIONS

Generalized Method for Charge-Transfer Equilibration in Reactive Molecular Dynamics

(2021) Tobias Gergs et al.   Journal of Chemical Theory and Computation

Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks

(2021) Tobias Gergs et al.   Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Small data materials design with machine learning: When the average model knows best

(2020) Danny E. P. Vanpoucke et al.   JOURNAL OF APPLIED PHYSICS

Physics and technology of magnetron sputtering discharges

(2020) Jon Tomas Gudmundsson   PLASMA SOURCES SCIENCE & TECHNOLOGY

Fast and interpretable classification of small X-ray diffraction datasets using data augmentation and deep neural networks

(2019) Felipe Oviedo et al.   npj Computational Materials

Bayesian Determination of Parameters for Plasma-Wall Interactions

(2019) Roland Preuss et al.   Entropy

Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review

(2018) Abid Iqbal et al.   SENSORS

Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands

(2018) Andresa Baptista et al.   Coatings

Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties

(2017) Denis Music et al.   JOURNAL OF APPLIED PHYSICS

From quantum to continuum mechanics: studying the fracture toughness of transition metal nitrides and oxynitrides

(2017) James S. K.-L. Gibson et al.   Materials Research Letters

Dynamical properties of AlN nanostructures and heterogeneous interfaces predicted using COMB potentials

(2016) Kamal Choudhary et al.   COMPUTATIONAL MATERIALS SCIENCE

Characterization of the nitrogen split interstitial defect in wurtzite aluminum nitride using density functional theory

(2014) A. Szállás et al.   JOURNAL OF APPLIED PHYSICS

On the time scale associated with Monte Carlo simulations

(2014) Kristof M. Bal et al.   JOURNAL OF CHEMICAL PHYSICS

A genetic algorithm-based virtual sample generation technique to improve small data set learning

(2014) Der-Chiang Li et al.   NEUROCOMPUTING

Classical atomistic simulations of surfaces and heterogeneous interfaces with the charge-optimized many body (COMB) potentials

(2013) Tao Liang et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Uniform-acceptance force-bias Monte Carlo method with time scale to study solid-state diffusion

(2012) Maarten J. Mees et al.   PHYSICAL REVIEW B

Artificial Neural Network application for predicting in-flight particle characteristics of an atmospheric plasma spray process

(2011) T.A. Choudhury et al.   SURFACE & COATINGS TECHNOLOGY

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Visualization and analysis of atomistic simulation data with OVITO–the Open Visualization Tool

(2009) Alexander Stukowski   MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING