Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges

Published 2023 View Full Article

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Title
Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-01-28
DOI
10.1088/1361-6463/acb6a4

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