An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor

Self-cleaning applications of TiO2 by photo-induced hydrophilicity and photocatalysis

(2015) Swagata Banerjee et al.   APPLIED CATALYSIS B-ENVIRONMENTAL

Recent developments in TiO2 as n- and p-type transparent semiconductors: synthesis, modification, properties, and energy-related applications

(2015) V. C. Anitha et al.   JOURNAL OF MATERIALS SCIENCE

Low temperature temporal and spatial atomic layer deposition of TiO2 films

(2015) Morteza Aghaee et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition

(2015) Peter Schindler et al.   LANGMUIR

Atomic layer deposition of Al2O3 and Al2O3/TiO2 barrier coatings to reduce the water vapour permeability of polyetheretherketone

(2015) Tamkin Ahmadzada et al.   THIN SOLID FILMS

Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition

(2014) Lae Ho Kim et al.   ACS Applied Materials & Interfaces

Spectroscopic ellipsometry characterization of amorphous and crystalline TiO 2 thin films grown by atomic layer deposition at different temperatures

(2014) D. Saha et al.   APPLIED SURFACE SCIENCE

Titanium Dioxide Nanomaterials for Photovoltaic Applications

(2014) Yu Bai et al.   CHEMICAL REVIEWS

MOCVD of TiO2Thin Films using a Heteroleptic Titanium Complex: Precursor Evaluation and Investigation of Optical, Photoelectrochemical and Electrical Properties

(2014) Manish Banerjee et al.   CHEMICAL VAPOR DEPOSITION

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

(2014) Mikko Kaipio et al.   LANGMUIR

Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide

(2014) Stephan Ratzsch et al.   NANOTECHNOLOGY

In-Situ Nitrogen Doping of the TiO2Photocatalyst Deposited by PEALD for Visible Light Activity

(2014) Zhipeng Rao et al.   PLASMA SCIENCE & TECHNOLOGY

Controlling the Atomic Layer Deposition of Titanium Dioxide on Silicon: Dependence on Surface Termination

(2013) Stephen McDonnell et al.   Journal of Physical Chemistry C

Influence of layer type and order on barrier properties of multilayer PECVD barrier coatings

(2013) K Bahroun et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Surface pre-treatment for barrier coatings on polyethylene terephthalate

(2013) H Bahre et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition

(2013) Van-Son Dang et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Thermal properties of thin Al2O3 films and their barrier layer effect on thermo-optic properties of TiO2 films grown by atomic layer deposition

(2013) Muhammad Rizwan Saleem et al.   THIN SOLID FILMS

Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation

(2013) Dong-Suk Han et al.   THIN SOLID FILMS

Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

(2011) Shih-Hui Jen et al.   JOURNAL OF APPLIED PHYSICS

Growth of TiO2 with Thermal and Plasma Enhanced Atomic Layer Deposition

(2011) Massimo Tallarida et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Thin film encapsulation for flexible AM-OLED: a review

(2011) Jin-Seong Park et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Characterization of reactively sputtered permeation barrier materials on polymer substrates

(2011) John Fahlteich et al.   SURFACE & COATINGS TECHNOLOGY

Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and Zn

(2010) Mark C. Biesinger et al.   APPLIED SURFACE SCIENCE

Crosslinking of porous SiOCH films involving Si–O–C bonds: Impact of deposition and curing

(2010) O. Gourhant et al.   JOURNAL OF APPLIED PHYSICS

Bipolar resistive switching in amorphous titanium oxide thin film

(2010) Hu Young Jeong et al.   Physica Status Solidi-Rapid Research Letters

Atomic layer deposition on polymer based flexible packaging materials: Growth characteristics and diffusion barrier properties

(2010) Tommi O. Kääriäinen et al.   THIN SOLID FILMS

Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

(2009) P. F. Carcia et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe)3 and Ozone

(2009) Martin Rose et al.   Journal of Physical Chemistry C

Atomic layer deposited aluminum oxide barrier coatings for packaging materials

(2009) Terhi Hirvikorpi et al.   THIN SOLID FILMS

Titanium Dioxide Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition for OLED Passivation

(2008) Woong-Sun Kim et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Growth Kinetics and Crystallization Behavior of TiO[sub 2] Films Prepared by Plasma Enhanced Atomic Layer Deposition

(2008) Qi Xie et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Permeation barrier properties of thin oxide films on flexible polymer substrates

(2008) John Fahlteich et al.   THIN SOLID FILMS