Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation
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Title
Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation
Authors
Keywords
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Journal
Plasma Processes and Polymers
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2022-05-20
DOI
10.1002/ppap.202200052
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