Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation

Title
Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2022-05-20
DOI
10.1002/ppap.202200052

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