Influence of spokes on the ionized metal flux fraction in chromium high power impulse magnetron sputtering

Published 2018 View Full Article

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Title
Influence of spokes on the ionized metal flux fraction in chromium high power impulse magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 51, Issue 11, Pages 115201
Publisher
IOP Publishing
Online
2018-02-01
DOI
10.1088/1361-6463/aaac15

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