In situ measurement of VUV/UV radiation from low-pressure microwave-produced plasma in Ar/O2 gas mixtures

Published 2017 View Full Article

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Title
In situ measurement of VUV/UV radiation from low-pressure microwave-produced plasma in Ar/O2 gas mixtures
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 28, Issue 8, Pages 085501
Publisher
IOP Publishing
Online
2017-07-17
DOI
10.1088/1361-6501/aa7816

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