Effect of nanoscopic defects on barrier performance of thin films deposited by plasma-enhanced atomic layer deposition on flexible polymers
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Title
Effect of nanoscopic defects on barrier performance of thin films deposited by plasma-enhanced atomic layer deposition on flexible polymers
Authors
Keywords
Plasma-enhanced atomic layer deposition, Mechanical stability, Thin film cracking, Gas transport properties, Mass spectrometry, Numerical simulations
Journal
THIN SOLID FILMS
Volume 738, Issue -, Pages 138960
Publisher
Elsevier BV
Online
2021-10-11
DOI
10.1016/j.tsf.2021.138960
References
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