Enhancing the separation properties of plasma polymerized membranes on polydimethylsiloxane substrates by adjusting the auxiliary gas in the PECVD processes

Title
Enhancing the separation properties of plasma polymerized membranes on polydimethylsiloxane substrates by adjusting the auxiliary gas in the PECVD processes
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 53, Issue 44, Pages 445301
Publisher
IOP Publishing
Online
2020-07-04
DOI
10.1088/1361-6463/aba296

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