Enhancing the separation properties of plasma polymerized membranes on polydimethylsiloxane substrates by adjusting the auxiliary gas in the PECVD processes
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Title
Enhancing the separation properties of plasma polymerized membranes on polydimethylsiloxane substrates by adjusting the auxiliary gas in the PECVD processes
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 53, Issue 44, Pages 445301
Publisher
IOP Publishing
Online
2020-07-04
DOI
10.1088/1361-6463/aba296
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