Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors
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Title
Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors
Authors
Keywords
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Journal
NATURE
Volume 604, Issue 7904, Pages 65-71
Publisher
Springer Science and Business Media LLC
Online
2022-04-07
DOI
10.1038/s41586-022-04425-6
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