Method to Achieve the Morphotropic Phase Boundary in HfxZr1−xO2 by Electric Field Cycling for DRAM Cell Capacitor Applications

Published 2021 View Full Article

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Title
Method to Achieve the Morphotropic Phase Boundary in HfxZr1−xO2 by Electric Field Cycling for DRAM Cell Capacitor Applications
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 4, Pages 517-520
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-02-18
DOI
10.1109/led.2021.3059901

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