Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics

Published 2011 View Full Article

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Title
Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 17, Pages 173505
Publisher
AIP Publishing
Online
2011-04-28
DOI
10.1063/1.3583590
References
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