Performance and Reliability of TiO2/ZrO2/TiO2(TZT) and AlO-Doped TZT MIM Capacitors

Published 2016 View Full Article

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Title
Performance and Reliability of TiO2/ZrO2/TiO2(TZT) and AlO-Doped TZT MIM Capacitors
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 63, Issue 10, Pages 3928-3935
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-09-10
DOI
10.1109/ted.2016.2601419

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