Morphotropic Phase Boundary of Hf1–xZrxO2 Thin Films for Dynamic Random Access Memories

Published 2018 View Full Article

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Title
Morphotropic Phase Boundary of Hf1–xZrxO2 Thin Films for Dynamic Random Access Memories
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 10, Issue 49, Pages 42666-42673
Publisher
American Chemical Society (ACS)
Online
2018-11-23
DOI
10.1021/acsami.8b15576

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