On the scaling of subnanometer EOT gate dielectrics for ultimate nano CMOS technology

Published 2015 View Full Article

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Title
On the scaling of subnanometer EOT gate dielectrics for ultimate nano CMOS technology
Authors
Keywords
Nano CMOS, Subnanometer EOT, Gate dielectrics, High-k
Journal
MICROELECTRONIC ENGINEERING
Volume 138, Issue -, Pages 57-76
Publisher
Elsevier BV
Online
2015-02-18
DOI
10.1016/j.mee.2015.02.023

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