Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing

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Title
Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
Authors
Keywords
Zirconia, Ferroelectricity, Atomic layer deposition, Thin films, TEM
Journal
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume 37, Issue 3, Pages 1135-1139
Publisher
Elsevier BV
Online
2016-10-26
DOI
10.1016/j.jeurceramsoc.2016.10.028

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