Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium

Published 2019 View Full Article

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Title
Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SL, Pages SL0801
Publisher
Japan Society of Applied Physics
Online
2019-09-19
DOI
10.7567/1347-4065/ab45e3

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