High-k HfxZr1-xO₂ Ferroelectric Insulator by Utilizing High Pressure Anneal

Published 2020 View Full Article

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Title
High-k HfxZr1-xO₂ Ferroelectric Insulator by Utilizing High Pressure Anneal
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 6, Pages 2489-2494
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-04-28
DOI
10.1109/ted.2020.2985635

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