Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films

Title
Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 117, Issue 26, Pages 262905
Publisher
AIP Publishing
Online
2020-12-29
DOI
10.1063/5.0029611

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