Compositional dependence of crystallization temperatures and phase evolution in hafnia-zirconia (HfxZr1−x)O2 thin films
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Title
Compositional dependence of crystallization temperatures and phase evolution in hafnia-zirconia (HfxZr1−x)O2 thin films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 116, Issue 19, Pages 192901
Publisher
AIP Publishing
Online
2020-05-11
DOI
10.1063/5.0002835
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