Regulating ferroelectricity in Hf0.5Zr0.5O2 thin films: Exploring the combined impact of oxygen vacancy and electrode stresses

标题
Regulating ferroelectricity in Hf0.5Zr0.5O2 thin films: Exploring the combined impact of oxygen vacancy and electrode stresses
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 134, Issue 17, Pages -
出版商
AIP Publishing
发表日期
2023-11-03
DOI
10.1063/5.0170657

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